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Investigation of Molybdenum Nitride Gate on SiO[sub 2] and HfO[sub 2] for MOSFET Application
Tsui, Bing-Yue, Huang, Chih-Feng, Lu, Chih-HsunVolume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2158576
File:
PDF, 259 KB
english, 2006