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Characterisation of reactively sputtered silicon oxide for thin-film transistor fabrication
Jun, S.-I., McKnight, T.E., Melechko, A.V., Simpson, M.L., Rack, P.D.Volume:
41
Year:
2005
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:20051045
File:
PDF, 100 KB
english, 2005