Fabrication of ultrathin and highly uniform silicon on insulator by numerically controlled plasma chemical vaporization machining
Sano, Yasuhisa, Yamamura, Kazuya, Mimura, Hidekazu, Yamauchi, Kazuto, Mori, YuzoVolume:
78
Year:
2007
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2766836
File:
PDF, 339 KB
english, 2007