Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Chiang, Mao-HsiungVolume:
10
Language:
english
Journal:
Sensors
DOI:
10.3390/s100402675
Date:
March, 2010
File:
PDF, 692 KB
english, 2010