Dynamic Characteristics Measurement of Silicon...

Key Engineering Materials 2011 / 6 Vol. 483

Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment

She, Dong Sheng, Wang, Xiao Dong, Zhang, Xi Wen, Wang, Li Ding
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Volume:
483
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/kem.483.18
Date:
June, 2011
File:
PDF, 819 KB
english, 2011
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