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ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Plasma Enhanced Atomic Layer Deposition of ZrO
Blanquet, Elisabeth, Monnier, Denis, Nuta, Ioana, Volpi, Fabien, Doisneau, Beatrice, Coindeau, Stephane, Roy, J., Detlefs, Blanka, Mi, Y., Zegenhagen, Jorg, Martinet, C., Wyon, C., Gros-Jean, MickaelYear:
2011
Language:
english
DOI:
10.1149/1.3572301
File:
PDF, 1.10 MB
english, 2011