Determination of the position and orientation of a flat...

Review of Scientific Instruments 2014 / 10 Vol. 85; Iss. 10

Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis

Zhuang, Guo-Yuan, Lee, Hau-Wei, Liu, Chien-Hung
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4897492
Date:
October, 2014
File:
PDF, 2.62 MB
english, 2014
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