Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy
Chang, Shang-Chou, Lin, Tien-Chai, Li, To-SingVolume:
2014
Year:
2014
Language:
english
Journal:
Journal of Nanomaterials
DOI:
10.1155/2014/690498
File:
PDF, 4.55 MB
english, 2014