Formation of Stoichiometric SrRuO[sub 3] Electrodes for PZT Capacitors by Pulsed-MOCVD
Minamidate, Jun, Nagai, Atsushi, Kim, Sukpil, Koo, June-mo, Shin, Sangmin, Park, Youngsoo, Funakubo, HiroshiVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2221768
File:
PDF, 362 KB
english, 2006