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LARGE AREA PIEZOELECTRIC ACTUATORS USING METAL FOIL SUBSTRATES WITH Pb(Zr x ,Ti 1 - x )O 3 THIN FILMS
KÜGELER, C., ROSEZIN, R., SCHNELLER, T., BÖTTGER, U., WASER, R.Volume:
100
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580802543375
Date:
December, 2008
File:
PDF, 1.02 MB
english, 2008