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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - New Generation of Structures Obtained by Direct Wafer Bonding of Processed Wafers
Aspar, Bernard, Lagahe-Blanchard, Chrystelle, Sousbie, Nicolas, Margail, Jacques, Moriceau, H.Volume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2357057
File:
PDF, 781 KB
english, 2006