Influence of High Selectivity Slurry in Shallow Trench...

Electrochemical and Solid-State Letters 2002 Vol. 5; Iss. 4

Influence of High Selectivity Slurry in Shallow Trench Isolation CMP on Junction Leakage Characteristics

Yoon, Il Young, Jeong, Jong Yeul, Park, Young Bae, Lee, Dok Won, Ryu, Hyuk Hyun, Lee, Won Gyu
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Volume:
5
Year:
2002
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1454550
File:
PDF, 421 KB
english, 2002
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