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Interference lithography for the synthesis of three-dimensional lattices in SU-8: Interrelation between porosity, an exposure dose and a grating period
Isakov, D.S., Kundikova, N.D., Miklyaev, Y.V.Volume:
47
Language:
english
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2015.06.023
Date:
September, 2015
File:
PDF, 1.26 MB
english, 2015