Extraction of Frequency Dependent Macromodels for Mems Squeezed-Film Damping Effects
Joseph Yang, Yao-Joe, Chien, Chih-Ming, Kamon, Mattan, Rabinovich, Vladimir L., Gilbert, John R.Volume:
21
Language:
english
Journal:
Journal of Mechanics
DOI:
10.1017/s1727719100000666
Date:
December, 2005
File:
PDF, 7.61 MB
english, 2005