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Numerical study of ion energy and angular distributions in dual-frequency capacitively coupled CF4 plasmas
Shuai, Wang, Xiang, Xu, Younian, WangVolume:
19
Year:
2012
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3684675
File:
PDF, 1.45 MB
english, 2012