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Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen
Abdel-Fattah, E., Bazavan, M., Sugai, H.Volume:
19
Year:
2012
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4766475
File:
PDF, 1.26 MB
english, 2012