Particle-In-Cell simulation of laser photodetachment in capacitively coupled radio frequency oxygen discharges
Teichmann, T., Küllig, C., Dittmann, K., Matyash, K., Schneider, R., Meichsner, J.Volume:
20
Year:
2013
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4831760
File:
PDF, 1.33 MB
english, 2013