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Rigorous and approximate analysis of metallic gratings in soft X-ray and EUV regions
Vallius, Tuomas, Turunen, Jari, Vahimaa, PasiVolume:
51
Language:
english
Journal:
Journal of Modern Optics
DOI:
10.1080/09500340412331286630
Date:
September, 2004
File:
PDF, 126 KB
english, 2004