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Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Noeth, A., Yamada, T., Tagantsev, A. K., Setter, N.Volume:
115
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2010.488560
Date:
November, 2010
File:
PDF, 584 KB
english, 2010