Fluid simulation of the phase-shift effect in Ar/CF...

Journal of Physics D Applied Physics 2012 / 12 Vol. 45; Iss. 48

Fluid simulation of the phase-shift effect in Ar/CF 4 capacitively coupled plasmas

Zhang, Yu-Ru, Bogaerts, Annemie, Wang, You-Nian
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Volume:
45
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/45/48/485204
Date:
December, 2012
File:
PDF, 11.13 MB
english, 2012
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