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A new fabrication method for elevated source/drain junctionless transistors
Tang, Xiaohui, Raskin, Jean-Pierre, Reckinger, Nicolas, Dai, Bing, Francis, Laurent AVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/16/165101
Date:
April, 2013
File:
PDF, 1.18 MB
english, 2013