Spoke transitions in HiPIMS discharges

Plasma Sources Science and Technology 2015 / 08 Vol. 24; Iss. 4

Spoke transitions in HiPIMS discharges

Hecimovic, A, Schulz-von der Gathen, V, Böke, M, von Keudell, A, Winter, J
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Volume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/4/045005
Date:
August, 2015
File:
PDF, 2.37 MB
english, 2015
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