Chemical sputtering of carbon films by simultaneous...

New Journal of Physics 2008 / 09 Vol. 10; Iss. 9

Chemical sputtering of carbon films by simultaneous irradiation with argon ions and molecular oxygen

Hopf, C, Schlüter, M, Schwarz-Selinger, T, von Toussaint, U, Jacob, W
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Volume:
10
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/10/9/093022
Date:
September, 2008
File:
PDF, 1.13 MB
english, 2008
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