Fundamental scaling properties of electro-mechanical...

Fundamental scaling properties of electro-mechanical switches

Knoll, A W, Grogg, D, Despont, M, Duerig, U
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Volume:
14
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/14/12/123007
Date:
December, 2012
File:
PDF, 2.03 MB
english, 2012
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