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Power MEMS 2012
Rodrigues Ribeiro, R. S., Soppera, Olivier, Guerreiro, Ariel, Oliva, Abel, Jorge, PedroVolume:
21
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2207837
Date:
August, 2012
File:
PDF, 1.80 MB
2012