Operation Characteristics and Optical Emission Distribution of a Miniaturized Silicon Through-Substrate Split-Ring Resonator Microplasma Source
Berglund, Martin, Persson, Anders, Thornell, GregerVolume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2312849
Date:
December, 2014
File:
PDF, 2.90 MB
english, 2014