High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms...

Journal of Microelectromechanical Systems 2015 / 4 Vol. 24; Iss. 2

High- $Q$ AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing

Fu, Jenna L., Ayazi, Farrokh
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2333743
Date:
April, 2015
File:
PDF, 2.02 MB
english, 2015
Conversion to is in progress
Conversion to is failed