Ablation Dynamics of Silicon by Femtosecond Laser and the...

Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

Zhao, X., Shin, Y. C.
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Volume:
135
Language:
english
Journal:
Journal of Manufacturing Science and Engineering
DOI:
10.1115/1.4025805
Date:
November, 2013
File:
PDF, 3.75 MB
english, 2013
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