Impact of the phase defect structure on an actinic...

Journal of Micro/Nanolithography MEMS and MOEMS 2013 / 03 Vol. 12; Iss. 2

Impact of the phase defect structure on an actinic dark-field blank inspection signal and wafer printability

Amano, Tsuyoshi, Arisawa, Yukiyasu, Terasawa, Tsuneo
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Volume:
12
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.12.2.021002
Date:
March, 2013
File:
PDF, 5.02 MB
english, 2013
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