SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications - Enhanced reflectivity and stability of Sc/Si multilayers
Yulin, Sergiy A., Schaefers, Franz, Feigl, Torsten, Kaiser, Norbert, Khounsary, Ali M., Dinger, Udo, Ota, KazuyaVolume:
5193
Year:
2004
Language:
english
DOI:
10.1117/12.505582
File:
PDF, 477 KB
english, 2004