(Invited) Direct Bonding: A Key Enabler for 3D Monolithic...

ECS Transactions 2014 / 08 Vol. 64; Iss. 5

(Invited) Direct Bonding: A Key Enabler for 3D Monolithic Integration

Brunet, L., Batude, P., Fournel, F., Benaissa, L., Fenouillet-Beranger, C., Pasini, L., Deprat, F., Previtali, B., Ponthenier, F., Seignard, A., Euvrard-Colnat, C., Rivoire, M., Besson, P., Arvet, C.,
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Volume:
64
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06405.0381ecst
Date:
August, 2014
File:
PDF, 576 KB
english, 2014
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