Thermodynamics and Kinetics of SiC CVD Epitaxy

ECS Transactions 2014 / 08 Vol. 64; Iss. 7

Thermodynamics and Kinetics of SiC CVD Epitaxy

Yanguas-Gil, A., Shenai, K.
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Volume:
64
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06407.0133ecst
Date:
August, 2014
File:
PDF, 3.08 MB
english, 2014
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