Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface
Habuka, Hitoshi, Shimada, Manabu, Okuyama, KikuoVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1373660
File:
PDF, 80 KB
english, 2001