Reliability Characteristics of W/WN/TaO[sub x]N[sub y]/SiO[sub 2]/Si Metal Oxide Semiconductor Capacitors
Cho, Heung-Jae, Cha, Tae-Ho, Lim, Kwan-Yong, Park, Dae-Gyu, Kim, Jae-Young, Kim, Joong-Jung, Heo, Sung, Yeo, In-Seok, Park, Jin WonVolume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1481532
File:
PDF, 190 KB
english, 2002