Copper Bottom-up Deposition by Breakdown of PEG-Cl...

Electrochemical and Solid-State Letters 2002 Vol. 5; Iss. 10

Copper Bottom-up Deposition by Breakdown of PEG-Cl Inhibition

Hayase, Masanori, Taketani, Munemasa, Aizawa, Koji, Hatsuzawa, Takeshi, Hayabusa, Keisuke
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Volume:
5
Year:
2002
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1507942
File:
PDF, 298 KB
english, 2002
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