A Special Case of Using Ellipsometry to Measure the...

A Special Case of Using Ellipsometry to Measure the Thickness of Oxide on Polysilicon

Tompkins, Harland G.
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Volume:
137
Year:
1990
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2086704
File:
PDF, 448 KB
english, 1990
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