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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Platinum Liner Deposited by Atomic Layer Deposition for Cu Interconnect Application
Zhu, Yu, Dunn, Kathleen, Kaloyeros, AlainVolume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209331
File:
PDF, 749 KB
english, 2006