Polymeric Resists for X-Ray Lithography

Journal of The Electrochemical Society 1974 Vol. 121; Iss. 11

Polymeric Resists for X-Ray Lithography

Thompson, L. F., Feit, E. D., Bowden, M. J., Lenzo, P. V., Spencer, E. G.
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Volume:
121
Year:
1974
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2401718
File:
PDF, 970 KB
english, 1974
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