[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Effect of Nitridation for High-K Layers by ALCVDTM in Order to Decrease the Trapping in Non Volatile Memories
Grampeix, Helen, Colonna, Jean-Philippe, Molas, Gabriel, Bocquet, Marc, Martin, François, Rochat, Névine, Martinez, Eugénie, Licitra, Christophe, Veyron, Thomas, Papon, Anne-Marie, Gely, Marc, YckaVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779085
File:
PDF, 491 KB
english, 2007