Effects of OH Radicals on Formation of Cu Oxide and...

Electrochemical and Solid-State Letters 2008 Vol. 11; Iss. 2

Effects of OH Radicals on Formation of Cu Oxide and Polishing Performance in Cu Chemical Mechanical Polishing

Kang, Min Cheol, Nam, Ho-Seong, Won, Ho Youn, Jeong, Sukhoon, Jeong, Haedo, Kim, Jae Jeong
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Volume:
11
Year:
2008
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2817518
File:
PDF, 372 KB
english, 2008
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