Application of Supercritical CO[sub 2] Fluid for Dielectric Improvement of SiO[sub x] Film
Tsai, Chih-Tsung, Chang, Ting-Chang, Liu, Po-Tsun, Cheng, Yi-Li, Kin, Kon-Tsu, Huang, Fon-ShanVolume:
12
Year:
2009
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3028217
File:
PDF, 353 KB
english, 2009