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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Development of a Single-beam Megasonic System for Nano-particle Cleaning
Kim, Hyunse, Lee, Yanglae, Lim, EuisuYear:
2009
Language:
english
DOI:
10.1149/1.3202664
File:
PDF, 1.54 MB
english, 2009