ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - Improvement of Characteristic Ramped Voltage Breakdown in Multi-Level Cu/SiOC Low k Integration
Chen, Yuwen, Zou, Johnston, Chen, Steven, Bei, E., Wang, JimmyYear:
2010
Language:
english
DOI:
10.1149/1.3360642
File:
PDF, 120 KB
english, 2010