Optimization of CMP Pad Surface by Laser Induced Micro Hole
Yang, Ji Chul, Kim, Hojoong, Lee, Chil-Gee, Lee, Hyeon-Deok, Kim, TaesungVolume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3505300
File:
PDF, 869 KB
english, 2011