Effect of nanomechanical and microstructural properties on...

Surface Engineering 2012 / 04 Vol. 28; Iss. 3

Effect of nanomechanical and microstructural properties on annealed multilayer Si0·8Ge0·2–Si films

Lin, T-Y, Tsai, C-H, Yau, W-H, Chou, C-P
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Volume:
28
Language:
english
Journal:
Surface Engineering
DOI:
10.1179/1743294411y.0000000042
Date:
April, 2012
File:
PDF, 469 KB
english, 2012
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