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Thermodynamical Model for the Description of the Equilibrium of the SiCl4, O2, SF6, System in CVD Process
Aulitto, V., Zuccala, A., Modone, E.Volume:
11
Language:
english
Journal:
Journal of Optical Communications
DOI:
10.1515/joc.1990.11.2.65
Date:
January, 1990
File:
PDF, 415 KB
english, 1990