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Mikrogehäuste mediengetrennte Silizium-Druck- und Differenzdrucksensoren für industrielle Anwendungen (Silicon-based Microsensors for Pressure and Differential Pressure with Media Separation for Industrial Applications)
Wohlgemuth, Christian, Sindlinger, Stefan, Werthschützky, Roland, Thiele, PeterVolume:
72
Language:
german
Journal:
tm - Technisches Messen
DOI:
10.1524/teme.2005.72.11.638
Date:
January, 2005
File:
PDF, 502 KB
german, 2005