An Integrated Thermal Compensation System for MEMS Inertial...

Sensors 2014 / 03 Vol. 14; Iss. 3

An Integrated Thermal Compensation System for MEMS Inertial Sensors

Chiu, Sheng-Ren, Teng, Li-Tao, Chao, Jen-Wei, Sue, Chung-Yang, Lin, Chih-Hsiou, Chen, Hong-Ren, Su, Yan-Kuin
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Volume:
14
Language:
english
Journal:
Sensors
DOI:
10.3390/s140304290
Date:
March, 2014
File:
PDF, 1.18 MB
english, 2014
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