Reliability Research of Capacitive RF-MEMS Switch

Reliability Research of Capacitive RF-MEMS Switch

Song, Ming Xin, Wu, Rui, Liu, Qian, Wang, Hong, Cao, Zuo Bao, Chen, Ming Hua, Yin, Jing Hua
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Volume:
753-755
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.753-755.2507
Date:
August, 2013
File:
PDF, 289 KB
english, 2013
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