Effect of Hydroxyethyl Cellulose Concentration on Surface...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 5

Effect of Hydroxyethyl Cellulose Concentration on Surface Qualities of Silicon Wafer after Touch Polishing Process

Hwang, Hee-Sub, Lim, Jae-Hyung, Park, Jin-Hyung, Choi, Eun-Suck, Ahn, Jin-Woo, Park, Jea-Gun
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3314249
File:
PDF, 393 KB
english, 2010
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